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RS ISO 13424: 2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
Abstract

This International Standard specifies the minimum amount of information required in reports of
analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical
composition and thickness of homogeneous thin films, and measurement of the chemical composition
as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling,
peak-shape analysis, and variable photon energy XPS.

General Information

CodeClassificationThemePagesPublisherAvailability
RS ISO 13424: 2013ADOPTED ISO STANDARDSChemical technology54First Edition
Apr 2020		Available
Price: RWF 69,000


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