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RS ISO 14644-2: 2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Abstract

This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 ?m to 5 ?m. Concentrations of ultrafine particles (particles smaller than 0,1?m) will be addressed in a separate standard.

General Information

Code	Classification	Theme	Pages	Publisher	Availability
RS ISO 14644-2: 2015	ADOPTED ISO STANDARDS	Health care technology	14	First Edition Jun 2017	Available

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